1/22/2012	9:21:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/22/2012	9:21:30 AM	Recipe started at 9:21 AM
1/22/2012	9:21:30 AM	Helium valve closed
1/22/2012	9:21:30 AM	H2 valve closed
1/22/2012	9:21:30 AM	BCl3 valve closed
1/22/2012	9:21:30 AM	PH3 valve closed
1/22/2012	9:21:30 AM	SiCl4 pre valve closed
1/22/2012	9:21:30 AM	SiCl4 post valve closed
1/22/2012	9:21:30 AM	Main Vac valve closed
1/22/2012	9:21:30 AM	Bypass valve closed
1/22/2012	9:21:30 AM	Bubbler valve closed
1/22/2012	9:21:30 AM	Helium MFC set to  0.000000
1/22/2012	9:21:30 AM	H2 MFC set to  0.000000
1/22/2012	9:21:30 AM	BCl3 MFC set to  0.000000
1/22/2012	9:21:30 AM	PH3 MFC set to  0.000000
1/22/2012	9:21:30 AM	SiCl4 MFC set to  0.000000
1/22/2012	9:21:30 AM	Bypass solenoid MFC set to  0.000000
1/22/2012	9:21:30 AM	Tube furnace set to 0
1/22/2012	9:21:33 AM	H2 valve closed
1/22/2012	9:21:33 AM	BCl3 valve closed
1/22/2012	9:21:33 AM	PH3 valve closed
1/22/2012	9:21:33 AM	SiCl4 pre valve closed
1/22/2012	9:21:33 AM	SiCl4 post valve closed
1/22/2012	9:21:33 AM	Main Vac valve closed
1/22/2012	9:21:33 AM	Bypass valve closed
1/22/2012	9:21:33 AM	Bubbler valve closed
1/22/2012	9:21:33 AM	Helium valve opened
1/22/2012	9:21:33 AM	Helium MFC set to  500.000000
1/22/2012	9:21:33 AM	H2 MFC set to  0.000000
1/22/2012	9:21:33 AM	BCl3 MFC set to  0.000000
1/22/2012	9:21:33 AM	PH3 MFC set to  0.000000
1/22/2012	9:21:33 AM	SiCl4 MFC set to  0.000000
1/22/2012	9:21:33 AM	Bypass solenoid MFC set to  0.000000
1/22/2012	9:21:33 AM	Tube furnace set to 0
1/22/2012	9:22:39 AM	Helium valve closed
1/22/2012	9:22:39 AM	H2 valve closed
1/22/2012	9:22:39 AM	BCl3 valve closed
1/22/2012	9:22:39 AM	PH3 valve closed
1/22/2012	9:22:39 AM	SiCl4 pre valve closed
1/22/2012	9:22:39 AM	SiCl4 post valve closed
1/22/2012	9:22:39 AM	Main Vac valve closed
1/22/2012	9:22:39 AM	Bypass valve closed
1/22/2012	9:22:39 AM	Bubbler valve closed
1/22/2012	9:22:39 AM	Helium MFC set to  0.000000
1/22/2012	9:22:39 AM	H2 MFC set to  0.000000
1/22/2012	9:22:39 AM	BCl3 MFC set to  0.000000
1/22/2012	9:22:39 AM	PH3 MFC set to  0.000000
1/22/2012	9:22:39 AM	SiCl4 MFC set to  0.000000
1/22/2012	9:22:39 AM	Bypass solenoid MFC set to  0.000000
1/22/2012	9:22:39 AM	Tube furnace set to 0
1/22/2012	9:22:40 AM	Run finished at 9:22 AM
1/22/2012	9:22:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/22/2012	9:25:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/22/2012	9:25:07 AM	Recipe started at 9:25 AM
1/22/2012	9:25:07 AM	Helium valve closed
1/22/2012	9:25:07 AM	H2 valve closed
1/22/2012	9:25:07 AM	BCl3 valve closed
1/22/2012	9:25:07 AM	PH3 valve closed
1/22/2012	9:25:07 AM	SiCl4 pre valve closed
1/22/2012	9:25:07 AM	SiCl4 post valve closed
1/22/2012	9:25:07 AM	Main Vac valve closed
1/22/2012	9:25:07 AM	Bubbler valve closed
1/22/2012	9:25:07 AM	Bypass valve opened
1/22/2012	9:25:07 AM	Helium MFC set to  0.000000
1/22/2012	9:25:07 AM	H2 MFC set to  0.000000
1/22/2012	9:25:07 AM	BCl3 MFC set to  0.000000
1/22/2012	9:25:07 AM	PH3 MFC set to  0.000000
1/22/2012	9:25:07 AM	SiCl4 MFC set to  0.000000
1/22/2012	9:25:07 AM	Bypass solenoid MFC set to  0.000000
1/22/2012	9:25:07 AM	Tube furnace set to 0
1/22/2012	9:26:03 AM	Helium valve closed
1/22/2012	9:26:03 AM	H2 valve closed
1/22/2012	9:26:03 AM	BCl3 valve closed
1/22/2012	9:26:03 AM	PH3 valve closed
1/22/2012	9:26:03 AM	SiCl4 pre valve closed
1/22/2012	9:26:03 AM	SiCl4 post valve closed
1/22/2012	9:26:03 AM	Main Vac valve closed
1/22/2012	9:26:03 AM	Bubbler valve closed
1/22/2012	9:26:03 AM	Bypass valve opened
1/22/2012	9:26:03 AM	Helium MFC set to  0.000000
1/22/2012	9:26:03 AM	H2 MFC set to  0.000000
1/22/2012	9:26:03 AM	BCl3 MFC set to  0.000000
1/22/2012	9:26:03 AM	PH3 MFC set to  0.000000
1/22/2012	9:26:03 AM	SiCl4 MFC set to  0.000000
1/22/2012	9:26:03 AM	Bypass solenoid MFC set to  0.000000
1/22/2012	9:26:03 AM	Tube furnace set to 0
1/22/2012	9:27:03 AM	Helium valve closed
1/22/2012	9:27:03 AM	H2 valve closed
1/22/2012	9:27:03 AM	BCl3 valve closed
1/22/2012	9:27:03 AM	PH3 valve closed
1/22/2012	9:27:03 AM	SiCl4 pre valve closed
1/22/2012	9:27:03 AM	SiCl4 post valve closed
1/22/2012	9:27:03 AM	Bypass valve closed
1/22/2012	9:27:03 AM	Bubbler valve closed
1/22/2012	9:27:03 AM	Main Vac valve opened
1/22/2012	9:27:03 AM	Helium MFC set to  0.000000
1/22/2012	9:27:03 AM	H2 MFC set to  0.000000
1/22/2012	9:27:03 AM	BCl3 MFC set to  0.000000
1/22/2012	9:27:03 AM	PH3 MFC set to  0.000000
1/22/2012	9:27:03 AM	SiCl4 MFC set to  0.000000
1/22/2012	9:27:03 AM	Bypass solenoid MFC set to  0.000000
1/22/2012	9:27:03 AM	Tube furnace set to 0
1/22/2012	9:27:04 AM	Run finished at 9:27 AM
1/22/2012	9:27:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
